About: http://webisa.webdatacommons.org/383902003

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the silicon compound such as silicon nitride, silicon carbide or silicon oxinitride us used, in particular, the firing should be effected in an inert atmosphere so that the silicon compound is not oxidized.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr