About: http://webisa.webdatacommons.org/383940273

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, an insulating film including silicon as its main constituent, which serves as a gate insulating film 109, is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au