About: http://webisa.webdatacommons.org/383951000

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	While the masking films 12 are made of Mo metal in this embodiment, films made of metal such as Ti, Ta, Ni, and Al, of an inorganic material, and of organic material having a low transmissivity can also be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com