About: http://webisa.webdatacommons.org/384063432

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Shallow trench isolation structures are formed by filling the shallow trenches with a dielectric material such as silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org