About: http://webisa.webdatacommons.org/384106115

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate transfer aperture 372 is selectively sealed by a sealing apparatus such as a gate valve or slit valve (not shown).
http://www.w3.org/ns/prov#wasQuotedFrom	google.es