About: http://webisa.webdatacommons.org/384123537

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This embodiment comprises a pair of the transparent substrate 1 and a device substrate 10 made of glass or ceramics such as Al2O3, Si3N4 and BN or the like which face each other with a vacuum space 4 in between.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca