About: http://webisa.webdatacommons.org/384273942

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma will chemically alter and... 36 US20110089967 MEMS PROBE CARD AND MANUFACTURING METHOD THEREOF Provided are a micro-electro-mechanical system (MEMS) probe card and a method for manufacturing the same.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com