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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating layer 111 is made of, for example, an inorganic compound such as silicon dioxide and silicon nitride.On the insulating layer 111, semiconductor layers SC of the switching elements SW are arranged.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com