| http://www.w3.org/ns/prov#value | - The first interlayer insulating film 635 is formed of an inorganic material such as silicon oxide, silicon nitride, or silicon oxynitride, and the second interlayer insulating film is formed of an organic insulating material such as polyimide, acrylic, polyimiamide, and BCB (benzocyclobutene).
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