About: http://webisa.webdatacommons.org/384477383

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It will be understood, however, that e-beam, x-ray or other forms of radiation may be used to expose corresponding resist or other lithographically definable layers using the same layering technique disclosed herein.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com