About: http://webisa.webdatacommons.org/38458965

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, a thin film including a silicon is formed on at least either the semiconductor substrate and the single crystalline piezoelectric element, and the semiconductor substrate directly with the electro-acoustic element.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es