About: http://webisa.webdatacommons.org/384598923

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Other steps include removal of material from the wafer subtractively by processes such as wet etches, reactive ion etches (RIE), etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com