PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The polishing rate, finish and flatness are determined by many factors, including the pad and slurry combination, the carrier head configuration, the relative speed between the substrate and pad, and the force pressing the substrate against the pad.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com