About: http://webisa.webdatacommons.org/384818865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The onium hydroxide should be sufficiently soluble in a solution such as water, alcohol or other organic liquid, or mixtures thereof to permit a useful wet etch rate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com