About: http://webisa.webdatacommons.org/38491326

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The following is a detailed description of the presumably best embodiment for carrying out the present invention in terms of the thin-film piezoelectric element and of the method of making same referring to the drawings.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com