About: http://webisa.webdatacommons.org/385038530

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The material of the thick conductor film 6L is not limited to Cu but various materials such as Cu alloy, Al, Al alloy, tungsten or tungsten alloy can be used instead.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com