PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Through better characterization of variation due to process tools and processes, metrology can be used to reduce time-to-market and cost-of-manufacturing. [0004] Measurements are often performed during the processing of an integrated circuit to gauge whether a process or process flow will result in the intended integrated circuit.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com