About: http://webisa.webdatacommons.org/38518015

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The variable spacing between electrodes is very important because it would be impossible to optimize the etch and other processes without
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com