About: http://webisa.webdatacommons.org/38521712

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The stop layers 114, 120, 122, and 124 (or thin insulation layers where these layers are not used as etch stop layers) and the capping layers are of materials such as silicon nitride (SixNx) or silicon oxynitride (SiON).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com