About: http://webisa.webdatacommons.org/385500542

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The operation of rinse tubes 119a, 119b and delivery tubes 120a, 120b allows independent control of deionized water and cleaning fluids or of any two types of fluids.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com