About: http://webisa.webdatacommons.org/385556101

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate may be any semiconductor material known in the art, including a silicon dioxide, a silicon nitride, gallium arsenate, or a silicon carbide, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com