About: http://webisa.webdatacommons.org/385613056

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method as in claim 1, wherein said single plasma operation uses a gas mixture including H2 and N2, in which a H2 concentration is greater than a N2 concentration.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com