About: http://webisa.webdatacommons.org/385632514

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The semiconductor device according to claim 2, wherein said sensor is an acceleration sensor; and wherein said acceleration sensor is formed in said MEMS process. 16.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es