About: http://webisa.webdatacommons.org/385809919

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	These include a plasma etching or other step to remove the exposed electrolyte, leaving behind the portion disposed under the negative resist pattern 46 of FIG. 3(c).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com