| http://www.w3.org/ns/prov#value | - Additionally, a single-wafer type CVD system may be used for formation of the buffer layer 2. [0027] It is checked on off-line whether or not the buffer layer 2 thus formed has the specific composition, by analysis such as X-ray diffraction, Rutherford back-scattering (RBS), secondary ion mass spectrometry (SIMS), observation by transmission electron microscope (TEM), spectroscopic ellipsometry, o
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