| http://www.w3.org/ns/prov#value | - depositing a first precursor on a substrate while preventing gas phase reaction of the first precursor and a second precursor with which the first precursor otherwise exhibits gas phase reactivity, the first precursor comprising a chelate of Al(NR1R2)x(NR3(CH2)zNR4R5)y or Al(NR1R2)x(NR3(CH2)zOR4)y; where x is 0, 1, or 2; y is 3???x; z is an integer from 2 to 8; and R1 to R5 are independently selec
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