About: http://webisa.webdatacommons.org/38616746

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The gate insulator layer 6 is preferably formed of an insulating material such as MgO, Si.sub.3 N.sub.4, and has a thickness sufficient to prevent a tunnel current, for example, athickness of not less than 10 nanometers.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com