About: http://webisa.webdatacommons.org/386239791

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, as described below, to prevent wafers from being contaminated, impurities composed of elements other than aluminum (Al), silicon (Si), oxygen (O) and nitrogen (N) should preferably be not more than 0.2 weight % in total.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com