| http://www.w3.org/ns/prov#value | - Additionally, it is also possible to precisely observe a surface of the sample by detecting secondary electrons generated by irradiating the charged particle beam.Further, in the above sample working/observing apparatus, the working/observing means may be made as is a probe that is capable of scanning a surface of the sample.According to the sample working/observing apparatus of the present invent
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