About: http://webisa.webdatacommons.org/386492897

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, in accordance with the principles of the present invention, a layer of silicon nitride or other material can be substituted for the silicon dioxide layer 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com