About: http://webisa.webdatacommons.org/386561098

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	blanking means, for shielding irradiation of the electron beam onto portions other than drawing portions;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com