About: http://webisa.webdatacommons.org/38656199

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process of claim 1, wherein a starting material used for the process is a silicon wafer with a mean COP diameter of less than 160 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com