About: http://webisa.webdatacommons.org/386571143

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A barrier layer, such as titanium nitride, as used in conventional CMOS processing, may be applied to the sidewalls to improve adhesion between a conductive material and the via sidewalls.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com