About: http://webisa.webdatacommons.org/386594842

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	by various methods such as chemical vapor deposition and physical vapor deposition, including sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com