About: http://webisa.webdatacommons.org/386670255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SUSS MicroTec was also the first to discover that proximity full field lithography is the best possible solution for thick resist applications such as MEMS and wafer-level packaging.
http://www.w3.org/ns/prov#wasQuotedFrom	suss.com