About: http://webisa.webdatacommons.org/386727211

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a plan view showing a positional relationship of the wafer and the cathode electrode; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com