About: http://webisa.webdatacommons.org/386815669

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Filling the trenches 50 with the metallic material may be accomplished by any method known to one of ordinary skill in the art such as by sputtering, evaporation, paste filling, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com