About: http://webisa.webdatacommons.org/387001338

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a result, there is a problem that such a residual oxide deteriorates the device characteristics but also forms a nucleus of defect in the preparation step of the device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com