About: http://webisa.webdatacommons.org/387022489

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A silicon oxide or nitride or other suitable material is deposited over the substrate and patterned to form a mask having openings of the desired shape of the doped region.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com