About: http://webisa.webdatacommons.org/387050064

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate processing chamber is used to process a substrate in an energized process gas to manufacture electronic circuits, such as integrated circuit chips and displays.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr