About: http://webisa.webdatacommons.org/38722803

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method according to claim 9, wherein the at least one layer is a metal, and the polishing medium has a pH in the range of 3.0 to 3.5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au