| http://www.w3.org/ns/prov#value | - Further, a silicon nitride film including oxygen corresponds to a film which includes more nitrogen than oxygen and includes oxygen, nitrogen, silicon, and hydrogen at concentrations ranging from 5 to 30 at. %, 20 to 50 at. %, 25 to 35 at. %, and 15 to 25 at. %, respectively.
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