About: http://webisa.webdatacommons.org/38731476

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surfaces that the residues adhere to include upper and lower electrode surfaces, walls of the plasma treatment chamber, clamping surfaces, and any other item with which the plasma or its by-products comes in contact.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au