About: http://webisa.webdatacommons.org/387341575

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring back to FIG. 1, UBM 14 of a titanium layer 11 and copper layer 12 are formed on a substrate that may include pads or other patterns formed thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com