About: http://webisa.webdatacommons.org/38735416

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This sputtering apparatus 100 is equipped with a sputtering chamber 101 which is evacuated by a vacuum pump such as cryopump or dry pump.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com