About: http://webisa.webdatacommons.org/387406367

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Second, source and drain regions 240 are doped using conventional methods, e.g. ion implantation, prior to forming elevated layers 250 and second layers 260.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com