About: http://webisa.webdatacommons.org/38760140

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This suggests that for solvents such as ethanol, the atmosphere above the wafer would have to be maintained at over about 99% saturation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au