About: http://webisa.webdatacommons.org/387688592

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ering the regions, other than the regions to be doped, with a photoresist.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com