About: http://webisa.webdatacommons.org/387899730

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ALD can further be employed for producing a metal layer, such as Ti or Fe, or other suitable metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com