About: http://webisa.webdatacommons.org/38823216

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This is followed by the deposition of an intrinsic polycrystalline silicon layer 30 on all the islands 18, having a thickness of e.g. 500 nm, said deposit being produced by low pressure chemical vapor deposition (LPCVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com